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Mass spectrometer Product List and Ranking from 17 Manufacturers, Suppliers and Companies | IPROS GMS

Last Updated： Aggregation Period:Jan 14, 2026～Feb 10, 2026
This ranking is based on the number of page views on our site.

Mass spectrometer Manufacturer, Suppliers and Company Rankings

Last Updated： Aggregation Period:Jan 14, 2026～Feb 10, 2026
This ranking is based on the number of page views on our site.

  1. 一般財団法人材料科学技術振興財団　MST Tokyo//Testing, Analysis and Measurement
  2. 東芝ナノアナリシス Kanagawa//Testing, Analysis and Measurement
  3. 日本ベクトン・ディッキンソン 品質管理・研究開発・注射剤の製剤研究・CMO Tokyo//Medical Devices
  4. 4 ATONARP INC. Tokyo//Electronic Components and Semiconductors
  5. 4 山善 Osaka//Machine elements and parts
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Mass spectrometer Product ranking

Last Updated： Aggregation Period:Jan 14, 2026～Feb 10, 2026
This ranking is based on the number of page views on our site.

  1. Wafer bevel evaluation technology 東芝ナノアナリシス
  2. [Analysis Case] Evaluation of Transdermal Absorption of Indomethacin in Three-Dimensional Cultured Human Skin 一般財団法人材料科学技術振興財団　MST
  3. BD Bruker MALDI Biotyper smart 日本ベクトン・ディッキンソン 品質管理・研究開発・注射剤の製剤研究・CMO
  4. Mass array method: A gene analysis method using mass spectrometry. 一般財団法人材料科学技術振興財団　MST
  5. 5 [Analysis Case] TOF-SIMS Analysis of Solder Separation Cross Section 一般財団法人材料科学技術振興財団　MST

Mass spectrometer Product List

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Application Example: Mass Spectrometry Technology and Data Acquisition

Application Example: Mass Spectrometry Technology and Data Acquisition

You can obtain reproducible results even with the minimum level of ion signature! We are currently offering a comprehensive catalog and case studies.

I will introduce examples of applications for mass spectrometry technology and data acquisition. In mass spectrometry, data capture is quite challenging, but by using a properly designed digitizer, this challenge can be significantly alleviated, allowing for reproducible results even at minimal levels of ion signatures. The MS (Mass Spectrometry) system enables fundamental analysis of the chemical composition of substance samples. It is highly regarded for its high specificity and qualitative and quantitative capabilities. [Overview (Excerpt)] ■ Mass Spectrometry ■ Components of the MS System ■ Performance Requirements of the MS System ■ MS Digitizer Related Functions ■ Low-Speed Response Systems ■ High-Speed Response Systems *For more details, please feel free to contact us.

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Mass Spectrometry Instruments for Life Sciences (Comprehensive Lineup)

Mass Spectrometry Instruments for Life Sciences (Comprehensive Lineup)

Perfect for analyzing complex applications! Download our comprehensive lineup of mass spectrometry devices that combine high precision, speed, and ease of use for free!

LECO's equipment is used daily around the world for the analysis of highly complex samples in today's environment. We provide instrument configurations tailored to your needs for sample analysis in various fields, including food, fragrances, petroleum, environmental issues, forensic science, materials science, and metabolomics. LECO's instruments are highly regarded for their accuracy, processing speed, and ease of use. Our quality policy is certified to ISO-9001:2008. 【Product Lineup】 ○ Comprehensive two-dimensional gas chromatography time-of-flight mass spectrometer "Pegasus 4D-C GC×GC-TOFMS" ○ Benchtop time-of-flight mass spectrometer "Pegasus BT 4D" ○ Ultra-high resolution gas chromatography time-of-flight mass spectrometer "Pegasus GC-HRT+4D" ● For more details, please download the catalog or contact us.

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[Document] Mass Spectrometry Guide

[Document] Mass Spectrometry Guide

Analyze using information obtained from various analytical methods such as functional groups and skeletal structures! Introducing the mass spectrometry guide.

This document introduces a guide to mass spectrometry. In the analysis of organic compounds, information is obtained and analyzed from various analytical methods based on the functional groups, skeletal structures, and masses of the compounds. There are various methods for analyzing the mass of compounds, each with its own strengths in terms of the type of analysis and targets. Additionally, these methods can be selectively used according to the application or combined with other analytical techniques to obtain the necessary information. [Contents] ■ Methods mainly used in mass spectrometry - GC-MS - LC-MS - MALDI-TOFMS - GPC *For more details, please refer to the PDF document or feel free to contact us.

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[Analysis Case] Depth Direction Analysis of Degradation Components in GCIB_Ar Cluster Organic Materials

[Analysis Case] Depth Direction Analysis of Degradation Components in GCIB_Ar Cluster Organic Materials

Component evaluation of organic EL layer structures and degradation layers using GCIB under controlled atmosphere.

This paper presents a case study analyzing the degradation components of organic materials that deteriorate due to atmospheric exposure, using GCIB (Ar cluster). The experiment utilized the organic EL material, Rubrene. Measurements of the atmosphere-exposed samples using TOF-SIMS revealed the presence of a mass (m/z 564) estimated to be Rubrene peroxide, as well as low molecular weight benzene-related masses (m/z 77, 105). It was confirmed that these degradation-related components exist at depths of approximately 1μm or more from the surface. *GCIB: Gas Cluster Ion Beam

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[Analysis Case] Degradation Analysis of Organic EL Devices Using MSDM

[Analysis Case] Degradation Analysis of Organic EL Devices Using MSDM

By visualizing the mass spectrum, more accurate analysis is possible.

Organic EL (OLED) is used in various applications such as high-definition display panels and lighting, and the demand for layer structure analysis and degradation analysis is increasing. However, since it is formed by combining various organic materials, elemental analysis alone can only capture a portion of the phenomena. This document presents a case study where depth direction analysis data of OLED was obtained using TOF-SIMS, and insights into the degradation of the sample were gained through MSDM (Mass Spectra Depth Mapping).

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[Analysis Case] Analysis of Paper Coated with Dyes and Pigments

[Analysis Case] Analysis of Paper Coated with Dyes and Pigments

Visualization of molecular information derived from dyes and pigments is possible using TOF-SIMS.

Color printers use ink to print on the surface of paper. The ink contains dyes and pigments, which have characteristic molecular information based on their colors. By visualizing this molecular information, it becomes possible to obtain information about the distribution of ink components on the paper surface and how deeply the ink components penetrate into the paper cross-section. Below, I will summarize the "imaging results of the paper surface" visualized by TOF-SIMS. TOF-SIMS can perform image analysis of molecular information ranging from 10 μm to 3 cm square.

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[Analysis Case] Evaluation of Transdermal Absorption of Indomethacin in Rat Skin

[Analysis Case] Evaluation of Transdermal Absorption of Indomethacin in Rat Skin

Visualization of the distribution of active ingredients in biological tissues using TOF-SIMS.

TOF-SIMS identifies components based on the mass of molecular ions, eliminating the need for labels such as fluorescent substances, allowing for imaging evaluations without their influence. Additionally, by performing cross-sectional imaging, it is possible to assess distribution in the depth direction. In this study, a gel formulation of indomethacin was applied to rat skin for 2 hours, and the distribution of the permeated active ingredient was visualized. As a result, indomethacin was found to be highly concentrated at approximately 5μm on the stratum corneum surface, and the depth profile analysis showed that it was gradually permeating.

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[Analysis Case] TOF-SIMS Analysis of Solder Separation Cross Section

[Analysis Case] TOF-SIMS Analysis of Solder Separation Cross Section

It is possible to evaluate the distribution of inorganic and organic substances in microdomains.

To investigate the causes of solder delamination, it is effective to conduct component analysis of the solder and the substrate interface. TOF-SIMS is a suitable method for evaluating delaminated areas because it can simultaneously analyze elemental composition and molecular information of organic and inorganic substances, as well as perform imaging analysis. This document presents a case study analyzing the cross-section of a delaminated solder area, confirming the distribution of substrate components, resin components, and organic components other than resin.

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[Analysis Case] Qualitative Evaluation of Fiber Optic Core and Cladding

[Analysis Case] Qualitative Evaluation of Fiber Optic Core and Cladding

Qualitative and distribution evaluation of optical fiber materials is possible using TOF-SIMS.

Optical fibers have a structure that consists of a core with a high refractive index surrounded by a cladding layer with a low refractive index. Due to the difference in refractive indices, light is totally internally reflected at the boundary and transmitted. Therefore, it is important to analyze the selection of materials, the presence of impurities, adhesion, coating conditions, and contaminants. Optical fibers can be broadly classified into two types: plastic and quartz. This document presents a case study in which the materials of the core and cladding were identified by analyzing the cross-section of plastic optical fibers using TOF-SIMS. Measurement method: TOF-SIMS Product field: Optical fibers, electronic components Analysis purpose: Qualitative evaluation, organic matter evaluation, composition distribution evaluation "For more details, please download the document or contact us."

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[Analysis Case] Molecular Structure Analysis of Liquid Crystal Materials

[Analysis Case] Molecular Structure Analysis of Liquid Crystal Materials

It is possible to estimate the structure of liquid crystal molecules in liquid crystal displays using GC/TOFMS.

The response speed, driving voltage, and reliability characteristics of liquid crystal panels are attributed to the molecular structure of the liquid crystals. Therefore, analyzing the details of the molecular structure is essential for controlling the display characteristics of liquid crystal panels. Here, we introduce a case where the liquid components in commercially available panels were extracted and structurally estimated using GC/TOFMS. Approximately 10 components, including liquid crystal materials that exhibit negative dielectric anisotropy, were estimated from precise mass information. Measurement method: GC/MS Product fields: Displays, televisions, projectors Analysis objectives: Market research, molecular structure evaluation, degradation investigation For more details, please download the materials or contact us.

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[Analysis Case] Structural Analysis of Fluoropolymer by LDI-MS

[Analysis Case] Structural Analysis of Fluoropolymer by LDI-MS

Structural analysis of fluorine-based grease, fluorine-based lubricants, and fluorine-based oils.

Fluoropolymer materials are chemically stable and possess various properties, making them widely used in industrial machinery, semiconductors, and electronics. LDI-MS (Laser Desorption Ionization Mass Spectrometry) is an analytical method that can ionize fluoropolymers with molecular weights of around several thousand while maintaining their molecular structure, allowing for the determination of the repeating units and molecular weights of fluoropolymers, as well as the estimation of end group compositions and structures. This document presents a case study on the structural analysis of perfluoropolyether (PFPE), which is used as a base oil in lubricants and heat transfer fluids. Measurement method: MALDI-MS Product field: Polymer materials Analysis purpose: Composition evaluation and identification, chemical bonding state evaluation For more details, please download the document or contact us.

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Differentiation of mass spectrometry methods for solid sample surfaces

Differentiation of mass spectrometry methods for solid sample surfaces

It is effective to differentiate between the two methods according to the purpose components and the size of the imaging field.

TOF-SIMS and MALDI-MS, which are representative mass spectrometry methods for solid sample surfaces, both enable qualitative analysis and imaging analysis. TOF-SIMS, which utilizes hard ionization methods, can detect inorganic and organic components with masses up to several hundred with high sensitivity. On the other hand, MALDI-MS, which employs soft ionization methods, can detect polymers in the range of thousands to tens of thousands. Additionally, the spatial resolution of the images also varies depending on the diameter of the irradiation beam.

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[Analysis Case] Simultaneous Qualitative Analysis of Inorganic and Organic Contaminants/Adhesives on Wafers

[Analysis Case] Simultaneous Qualitative Analysis of Inorganic and Organic Contaminants/Adhesives on Wafers

Simultaneous measurement of inorganic and organic components in minute specific areas.

TOF-SIMS has features such as simultaneous evaluation of organic and inorganic materials, capability for micro-area analysis, and high sensitivity for analyzing the very surface, making it effective for residue investigation in cleaning processes. An example is presented where pure water was dried on a silicon wafer. Optical microscopy only reveals slight point-like foreign substances and cloudiness. However, the results measured by TOF-SIMS showed that in the contaminated areas, organic components such as hydrocarbons, PDMS, and amides, which tend to adsorb naturally, were aggregated.

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[Analysis Case] Imaging of Lipids

[Analysis Case] Imaging of Lipids

Imaging of lipids in mouse testis! Introducing cases measured with TOF-SIMS and MALDI-MS.

Our organization conducts lipid imaging. TOF-SIMS excels in low-mass components and enables imaging with high spatial resolution. On the other hand, MALDI-MS specializes in high-mass components and offers a wide variety of lipids that can be imaged. Here, we present examples of measurements taken with TOF-SIMS and MALDI-MS, using lipid imaging mass spectrometry results from mouse testes as a case study. [Measurement Methods] ■ [TOF-SIMS] Time-of-Flight Secondary Ion Mass Spectrometry ■ [MALDI-MS] Matrix-Assisted Laser Desorption Ionization Mass Spectrometry *For more details, please download the PDF or feel free to contact us.

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MS system "Smart Flash MS System"

MS system "Smart Flash MS System"

Mass spectrometry detection medium pressure fractionation chromatography system!

This product is an easy-to-use MS system optimized for fractionation through the fusion of a high-performance benchtop MS and Smart Flash. It fully demonstrates the diverse capabilities of high-performance MS spectra. MS spectral analysis and MS monitoring can be conducted simultaneously with medium-pressure chromatography. It can measure accurate m/z values in 0.1 increments, allowing for precise identification of molecular weights, and it has minimal operational environment constraints, enabling accurate measurements even with temperature variations. Additionally, it comes standard with a dirt-resistant APCI probe, making it suitable for high-concentration samples and allowing for easy use without concerns about clogging or special maintenance. 【Features】 ■ The measurement range of MS spectra is broad, from m/z 10 to 1,200. ■ All m/z values within the specified range are saved in one-second increments. ■ Compact size that fits within a draft. ■ Standard equipped with an APCI probe. ■ Two types of probes, ESI and APCI, are provided as standard. *For more details, please contact us or download the catalog.

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[Analysis Case] Characterization of Culture Medium

[Analysis Case] Characterization of Culture Medium

For the identification of main components, we conduct semi-quantitative analysis of multiple components, and for the management of specific components, we perform quantitative analysis, tailoring the analysis to the intended use.

The culture medium contains various compounds, including amino acids, organic acids, vitamins, nucleic acid-related compounds, and metabolites secreted from cells. At Kaneka Techno Research, we can semi-quantitatively and quantitatively analyze many organic and inorganic components contained in the culture medium using various analytical methods. By performing multivariate analysis on the obtained data, we can identify the component factors that influence production rates and provide useful information for problem-solving. ■ Analytical Methods Identification of main components: Semi-quantitative analysis of multiple components Management of target components: Quantitative analysis, etc. 〈Equipment Used〉 LC-MS/MS, CE-TOF/MS, GC/MS, IC, ICP-AES, ICP-MS, etc. This technology can also be applied to research and development in the medical field, such as regenerative cells, and the food industry.

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Introduction to the Application Note for the Mass Spectrometry Device ASTON

Introduction to the Application Note for the Mass Spectrometry Device ASTON

We will introduce various applications using the mass spectrometry device ASTON.

We would like to introduce application notes using the mass spectrometry device ASTON. <Application Note List> 1. ASTON Application Note_vol.1_Chamber Cleaning 2. ASTON Application Note_vol.3_Simple Component Analysis of Ethanol 3. ASTON Application Note_vol.2_High Sensitivity Endpoint Detection_Etching Process Monitoring *Application notes will be added as needed.

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Technical Data: KMD Plot of Nonionic Surfactants

Technical Data: KMD Plot of Nonionic Surfactants

We conducted an ingredient investigation regarding abnormal products containing nonionic surfactants!

This document introduces the technology of KMD plotting for nonionic surfactants. Surfactants are often used in blends of multiple types, and even when looking at individual surfactants, they are composed of numerous homologs, with the number of contained components often exceeding 100. In such cases, using LC/Q-TOFMS and KMD plot analysis allows for a visual distinction between normal and abnormal products. [Contents] ■ The difficulty of identifying drug-containing components using LC/MS ■ KMD plot analysis using LC/Q-TOFMS data ■ Principles *For more details, please refer to the PDF document or feel free to contact us.

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Application Data: Example of Negative Ion Measurement by TFA Removal (2)

Application Data: Example of Negative Ion Measurement by TFA Removal (2)

Using the desalting tube "Sornak Tube" for LC/MS! The effect of TFA removal allows for signal detection.

When analyzing acidic compounds using reversed-phase partition chromatography, an acidic mobile phase (set to a pH that is at least 2 lower than the pKa of the analyte) may be used to suppress dissociation. Common acidic mobile phases suitable for use in LC/MS include acetic acid, formic acid, and trifluoroacetic acid (TFA). While TFA is appropriate for use at low pH, it is believed to cause ionization suppression with nearly 100% probability when detecting the analyte as a negative ion. Using methionine, an amino acid with acidic groups and high polarity, as the sample, TFA was removed from the eluent using a Sorbent tube, and negative ion measurements were conducted. For details on conditions and analysis results, please download the catalog. 【LC Conditions (Partial)】 ■ Equipment: Agilent 1200 ■ Flow rate: 0.3 ml/min ■ Detector: UV (210 nm) ■ Sample: Methionine 20 ppm solution ■ Injection volume: 5 μL *For more details, please refer to the PDF document or feel free to contact us.

  • Tubes and hoses
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Wafer bevel evaluation technology

Wafer bevel evaluation technology

Established a method for high-precision component evaluation using sensitivity and quantification-focused SIMS (D-SIMS)!

The component evaluation of the wafer bevel area is generally conducted using TEM or TOF-SIMS; however, both of these methods have limitations in sensitivity and quantification, making it difficult to evaluate trace components. By using a newly developed dedicated fixture, we have established a method for high-precision component evaluation using sensitivity- and quantification-focused SIMS (D-SIMS). Please feel free to contact us when needed. 【Technical Overview】 ■ Fixed with a dedicated fixture to prevent positional shifts of samples in an unstable tilted state and to reduce detection stability issues. ■ Measurement positions can be selected with high precision and flexibility. *For more details, please download the PDF or feel free to contact us.

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Peptide discovery method "BLOTCHIP-MS method"

Peptide discovery method "BLOTCHIP-MS method"

Protocera offers high-quality testing through peptide exploration methods!

The "BLOTCHIP-MS method" is an analytical technique that simplifies the process from one-dimensional electrophoresis to mass spectrometry, using a new measurement plate (BLOTCHIP) designed for high-speed processing of large sample volumes in MALDI-TOF-MS. Proteins that interfere with peptide mass analysis and high concentrations of salts that may contaminate the extraction process from biological tissues are completely removed during the one-dimensional electrophoresis step. The peptides in the gel are transferred to the BLOTCHIP in a single step via electroblotting, establishing a high-speed peptide analysis method that omits the complicated steps of conventional methods. The BLOTCHIP-MS method can be applied to various peptide research purposes beyond biomarker development. 【Features】 ■ Simple pretreatment ■ Less target loss compared to conventional methods since no protein removal is performed ■ Quantitative analysis is possible if the target peptides are known *For more details, please download the PDF or feel free to contact us.

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Collection of Analysis Examples for Mass Spectrometry Devices in Life Sciences

Collection of Analysis Examples for Mass Spectrometry Devices in Life Sciences

Analysis case presentation! Mass spectrometry equipment suitable for complex sample analysis such as food, petroleum, and materials science.

LECO's high-performance mass spectrometry equipment is a newly designed device developed without any compromise in data acquisition speed, mass accuracy, isotope abundance ratio, mass resolution, and dynamic range. It is used worldwide for the analysis of very complex samples. Certified to ISO-9001:2008, its quality is recognized globally. We provide equipment configurations tailored to your needs for sample analysis in various fields, including food, fragrances, petroleum, environmental issues, scientific investigation, materials science, and metabolomics. [Published Examples] - Comparative analysis methods between samples in aroma component analysis - Analysis methods for differences between samples in polymer materials - Metabolome analysis methods - Approaches to the identification of unknown compounds *You can view analysis examples for free from the "Download" section below!

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Rapid Microbial Identification "MALDI Biotyper"

Rapid Microbial Identification "MALDI Biotyper"

Identification of bacteria, rapid, low cost, high precision

■ Low cost per sample, around several dozen yen ■ 7854 types. Original library can be expanded and shared ■ Identification of 1 sample in 11 minutes, 96 samples in 100 minutes using the smear method (※standard case) ■ Samples: bacteria, yeast, molds, etc. ■ Established protocols for filamentous fungi and acid-fast bacteria ■ Equipment used: microflex LT, microflex LT smart MALDI-TOF mass spectrometer

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[Information] History of MALDI Biotyper (White Paper)

[Information] History of MALDI Biotyper (White Paper)

From materials to microorganisms! A powerful technology that can identify down to the species level has been born.

This document explains the birth of MALDI-TOF MS, the development of the MALDI Biotyper, and the expansion of its applications. It reflects on the history of MALDI-TOF MS, the early role of scientists at Bruker in the manufacturing of commercial MALDI-TOF MS systems, and the impact of the widespread adoption of this technology. We encourage you to read it. 【Contents (partial)】 ■ Introduction ■ The birth of MALDI and the history of its early days ■ Bruker's first commercial MALDI-TOF MS system ■ Early applications of MALDI-TOF MS ■ Improvements in the usability of MALDI-TOF MS systems *For more details, please refer to the PDF document or feel free to contact us.

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[Analysis Case] Contamination Assessment of Si Wafer Bevel Area

[Analysis Case] Contamination Assessment of Si Wafer Bevel Area

It is possible to evaluate both metal components and organic components simultaneously.

In semiconductor device manufacturing, from the perspective of improving yield, it is necessary to enhance the cleanliness of the backside of the wafer and to remove substances that remain on the bevel area of the wafer. In this study, we conducted TOF-SIMS analysis of the bevel inclined surface to evaluate the distribution of contamination (Figure 2). Additionally, by comparing the mass spectra of the adhered substances with those of the normal area and the contamination source, we found that the adhered substances matched the metal (Cr) and organic components of the contamination source. TOF-SIMS can capture the contamination generation process in the bevel area (edge and inclined surface).

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[Analysis Case] Heating Degradation Test of Lithium-Ion Secondary Batteries

[Analysis Case] Heating Degradation Test of Lithium-Ion Secondary Batteries

Samples after thermal degradation can be evaluated using LC/MS/MS, TOF-SIMS, TEM+EDX, etc.

The development of lithium-ion secondary batteries faces challenges such as improving performance, extending lifespan, and enhancing reliability. To address these challenges, it is important to understand the degradation mechanisms of the batteries. In this study, we conducted a heating degradation test to evaluate the degradation mechanisms caused by temperature. After the heating degradation test, we assessed samples that showed significant capacity reduction using LC/MS/MS for the electrolyte, TOF-SIMS for the anode surface, and FIB-TEM+EDX for the cross-section of the anode.

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[Analysis Case] Evaluation of Film-Forming Component Encroachment on the Back Surface of the Wafer

[Analysis Case] Evaluation of Film-Forming Component Encroachment on the Back Surface of the Wafer

Quantitative evaluation of metal components is possible near the bevel area.

In semiconductor device manufacturing, it is necessary to remove metals remaining on the backside of the wafer from the perspective of improving yield, and it is important to quantitatively understand the amount of metal components remaining. To investigate the concentration distribution of metals remaining on the backside within a range of 500 µm from the bevel area, we conducted evaluations using TOF-SIMS. TOF-SIMS has the spatial resolution to detect metal components only near the bevel area, and by using standard samples with known concentrations, it is possible to quantitatively calculate the concentrations.

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[Analysis Case] Evaluation of Silicon (Si) Oxide Film State

[Analysis Case] Evaluation of Silicon (Si) Oxide Film State

It is possible to capture molecular information of inorganic substances in the depth direction using TOF-SIMS.

In depth-direction analysis of molecular information obtained by TOF-SIMS, (1) the depth resolution is good, (2) it is possible to distinguish the chemical states of inorganic materials such as oxides, nitrides, fluorides, carbides, alloys, and metals, (3) evaluation of trace states is possible, (4) monitoring of OH is possible, (5) relative comparisons between samples (film thickness, composition) are possible, and (6) image analysis allows for a visual capture of the distribution of states at the surface level of a few nanometers. We will summarize the results of natural oxide films and oxide films. Measurement method: TOF-SIMS Product field: LSI, memory Analysis purpose: evaluation of chemical bonding states, evaluation of composition distribution, thickness of corrosion layers For more details, please download the materials or contact us.

  • Contract Analysis
  • Mass spectrometer

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[Analysis Case] Distribution and State Evaluation of OH on Aluminum (Al) Surface

[Analysis Case] Distribution and State Evaluation of OH on Aluminum (Al) Surface

It is possible to capture molecular information of inorganic substances in the depth direction using TOF-SIMS.

The presence of OH and fluoride on the surface of aluminum electrodes is one of the causes of electrode corrosion, and investigating the state of the aluminum surface is essential for identifying the causes of defects. TOF-SIMS excels in depth resolution at the very surface and can measure depth distribution with high sensitivity while monitoring the state of inorganic substances. By evaluating the depth distribution along with OH, we discovered a phenomenon where OH increased without a change in the thickness of the oxide film. In this way, TOF-SIMS enables the evaluation of depth distribution of molecular information of inorganic substances that cannot be obtained through elemental analysis.

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  • Mass spectrometer

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[Analysis Case] Evaluation of the Cleaning Effect of Organic Ingredients

[Analysis Case] Evaluation of the Cleaning Effect of Organic Ingredients

You can measure the 300mm wafer as it is.

TOF-SIMS has the characteristics of simultaneously evaluating organic and inorganic materials, being capable of analyzing small areas with high sensitivity at the very surface, and allowing evaluation while still in the form of 300mm wafers, making it effective for residue investigations during cleaning processes. We will introduce an analysis case of the removal effect of organic contamination on Si surfaces. TOF-SIMS analysis was conducted on samples where amine-based organic materials were confirmed to be in extremely small quantities by XPS. Even in small areas, it is possible to measure components in such extremely small amounts.

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  • Mass spectrometer

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